Dual etch step process for making a three etch depth air bearing

Details Dual etch step process for making a three etch depth air bearing Dual etch step process for making a three etch depth air bearing

1997-05-14

1999-12-21

Gulakowski, Randy

Etching a substrate: processes

Forming or treating article containing magnetically...

216 41, 2960312, 2960315, G11B 560

Patent

active

060044721

ABSTRACT:
A dual etch process for forming an air bearing slider design with three etch depths. For one embodiment the first etch forms the leading and trailing step regions and the second etch forms the lateral step regions. The combination of the first and second etches form the negative pressure region.

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