Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1995-06-22
1996-10-08
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
7351421, 7351436, G01P 1513
Patent
active
055633447
ABSTRACT:
The use of a dual element approach provides high resolution position sensors based on electron tunneling. This approach allows miniaturization while utilizing the position sensitivity of electron tunneling to give high resolution. The dual-element tunneling structure overcomes the narrow bandwidth limitations of a single-element structure. A sensor with an operating range of 5 Hz to 10 kHz, which can have applications as an acoustic sensor, is disclosed. Noise is analyzed for fundamental thermal vibration of the suspended masses and is compared to electronic noise. It is shown that miniature tunnel accelerometers can achieve resolution such that thermal noise in the suspended masses is the dominant cause of the resolution limit. With a proof mass of order 100 mg, noise analysis predicts limiting resolutions approaching 10.sup.-9 g/.sqroot.Hz in a 300 Hz band and 10.sup.-8 g/.sqroot.Hz at 1 kHz.
REFERENCES:
patent: 3723866 (1973-03-01), Michaud et al.
patent: 4364008 (1982-12-01), Jacques
patent: 4675670 (1987-06-01), Lalonde et al.
patent: 4823230 (1989-04-01), Tiemann
patent: 5008774 (1991-04-01), Bullis et al.
patent: 5009111 (1991-04-01), West
patent: 5211051 (1993-05-01), Kaiser
patent: 5263470 (1993-11-01), Kaiser
Kaiser William J.
Kenny Thomas W.
Reynolds Joseph K.
Rockstad Howard K.
Van Zandt Thomas R.
California Institute of Technology
Oda Christine K.
Tachner Leonard
Williams Hezron E.
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