Dual diaphragm valve

Valves and valve actuation – Electrically actuated valve

Reexamination Certificate

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Details

C417S413100, C417S480000

Reexamination Certificate

active

06991213

ABSTRACT:
A valve for regulating the flow of fluids (gas or liquid) using two flexible diaphragms in which an additional element is added to promote rolling contact between the diaphragms. The valve operates in a normally open configuration where fluid flows into the valve, passed through holes or openings in two electrostatically operative diaphragms and out of the valve. The holes or openings in one diaphragm are offset from the holes or openings in the other diaphragm, so that upon electro-static actuation, the diaphragms will seal together, closing the valve.

REFERENCES:
patent: 5325880 (1994-07-01), Johnson et al.
patent: 5452878 (1995-09-01), Gravesen et al.
patent: 5671905 (1997-09-01), Hopkins, Jr.
patent: 5941501 (1999-08-01), Biegelsen et al.
patent: 5971355 (1999-10-01), Biegelsen et al.
patent: 6179586 (2001-01-01), Herb et al.
patent: 6568286 (2003-05-01), Cabuz
patent: 6729856 (2004-05-01), Cabuz et al.
patent: 6767190 (2004-07-01), Cabuz et al.

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