Dual diaphragm differential pressure transducer

Measuring and testing – Fluid pressure gauge – Diaphragm

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Details

73708, 361283, G01L 708, G01L 912, G01L 1302, H01G 700

Patent

active

046809716

ABSTRACT:
A corrosion proof differential pressure transducer includes a central disk and two thin ceramic diaphragms mounted close to but spaced from the disk on both sides thereof, with the diaphragms being intercoupled to move together. This may be accomplished, for example, by a rod passing through a hole in the center of the central disk which is secured to each of the diaphragms; or by a fluid such as silicone oil between the diaphragms and flowing through one or more holes through the central disk. The diaphragm, and disks and the rod are formed of alumina, quartz, or other inert, insulating material having substantially zero mechanical hysteresis. Conductive plates providing variable capacitance with changes in pressure are mounted on the inner surface one or both of the diaphragms and on the facing surface of the central disk. A housing and associated gaskets direct pressures from two different fluids to the two diaphragms, so that the differential pressure is measured.

REFERENCES:
patent: 4301492 (1981-11-01), Paquin et al.

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