Dual diaphragm capacitive differential pressure transducer

Details Dual diaphragm capacitive differential pressure transducer Dual diaphragm capacitive differential pressure transducer

1990-01-31

1990-11-27

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, G01L 912

Patent

active

049741179

ABSTRACT:
The invention provides a pressure transducer with two mainly identical ceramic members located opposite each other in a housing. Substantially cylindrical recesses are provided in each of the ceramic members, the innermost delimiting walls of each recess forming a thin diaphragm. Each diaphragm is provided with a conductive coating, and contact elements electrically connect each conductive coating with circuitry for determining differential capacitance. The recesses and the housing form first and second pressure chambers which are connected via a channel provided through the two ceramic members. Spacing material maintains the ceramic members at a constant spacing and also seals their periphery. Together with the inner walls of the diaphragms, the sealing material delimits an inner pressure chamber. A first port connects the first pressure chamber with a first external pressure source. A second channel connects the inner pressure chamber with a second external pressure source. In the preferred embodiment, the difference between a test pressure applied to the first and second pressure chambers and the reference pressure applied to the inner chamber is a function of the distance between the diaphragms, which changes as the diaphragms flex due to the pressure difference.

REFERENCES:
patent: 3858097 (1974-12-01), Polye
patent: 4422125 (1983-12-01), Antonazzi et al.

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