Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate
2008-05-27
2008-05-27
Pham, Hoai V (Department: 2892)
Active solid-state devices (e.g., transistors, solid-state diode
Combined with electrical contact or lead
Of specified material other than unalloyed aluminum
C257S759000, C257S760000, C257SE23145
Reexamination Certificate
active
11196038
ABSTRACT:
An improved dual damascene structure is provided for use in the wiring-line structures of multi-level interconnects in integrated circuit. In this dual damascene structure, low-K (low dielectric constant) dielectric materials are used to form both the di-electric layers and the etch-stop layers between the metal interconnects in the IC device. With this feature, the dual damascene structure can prevent high parasite capacitance to occur therein that would otherwise cause large RC delay to the signals being transmitted through the metal interconnects and thus degrade the performance of the IC device. With the dual damascene structure, such parasite capacitance can be reduced, thus assuring the performance of the IC device.
REFERENCES:
patent: 5679606 (1997-10-01), Wang et al.
patent: 6245662 (2001-06-01), Naik et al.
patent: 6265780 (2001-07-01), Yew et al.
patent: 6291334 (2001-09-01), Somekh
Huang Yimin
Lur Water
Sun Shih-Wei
Yew Tri-Rung
J.C. Patents
Pham Hoai V
United Microelectronics Corp.
LandOfFree
Dual damascene structure for the wiring-line structures of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Dual damascene structure for the wiring-line structures of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dual damascene structure for the wiring-line structures of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3956971