Dual comb electrode structure with spacing for increasing a...

Details Dual comb electrode structure with spacing for increasing a... Dual comb electrode structure with spacing for increasing a...

2007-08-14

2007-08-14

Connelly-Cushwa, Michelle (Department: 2874)

Optical waveguides

With optical coupler

Switch

C385S041000, C359S225100, C359S226200, C359S877000

Reexamination Certificate

active

11136392

ABSTRACT:
A dual comb electrode structure with spacing for increasing a driving angle of a micro mirror provided by MEMS (Micro-Electro-Mechanical system) structure and a microscanner adopting the same are provided. The dual comb electrode structure includes: a mirror unit for reflecting light; a plurality of movable comb electrodes protruded in both sides of the mirror unit; and a plurality of upper and lower static comb electrodes formed above and below the movable comb electrode so as to be alternated with the plurality of movable comb electrodes formed in both sides of the mirror unit, wherein a spacing between the upper static comb electrode and the movable comb electrode is different from a spacing between the lower static comb electrode and the movable comb electrode.

REFERENCES:
patent: 7034370 (2006-04-01), Kuo

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