Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Patent
1984-05-14
1986-07-01
Kittle, John E.
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
356239, 356431, 356446, 250563, 250572, G01N 2100
Patent
active
045976651
ABSTRACT:
A flaw detector for optically transmissive surfaces having a first light collector above the surface and a second light collector below the surface. A scanning light beam is directed into the first light collector through a beam entrance aperture and only light scattered from the surface is collected. Light specularly reflected from the surface exits the collector through the beam entrance aperture. Similarly, light passing through the surface enters the second collector, but the axial beam component is dumped through an opening in the second collector, while only diffracted light is collected. Preferably, two-stage light collectors are used with the first stage admitting the beam and generating a scattered or diffracted beam component, with the second stage admitting the scattered or diffracted beam component and integrating the component over a collection surface and sampling the integrated portion at a photoelectric detector. An electrical output signal from the detector may be displayed.
REFERENCES:
patent: 3663824 (1972-05-01), Blaisdell et al.
patent: 4243891 (1981-01-01), Dobler et al.
patent: 4360275 (1982-11-01), Louderback
patent: 4378159 (1983-03-01), Galbraith
patent: 4380032 (1983-05-01), Pfost
Galbraith Lee K.
Urbanek Karel
Kittle John E.
Schneck Thomas
Tencor Instruments
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