Dual chamber, high sensitivity gas sensor and pump

Details Dual chamber, high sensitivity gas sensor and pump Dual chamber, high sensitivity gas sensor and pump

1976-05-03

1977-09-06

Rolinec, Rudolph V.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

Frequency of cyclic current or voltage

23254F, G01N 2700

Patent

active

040471020

ABSTRACT:
Apparatus for measuring gas comprising a gas sensing unit having a gas inlet membrane and being evacuated by a sputter ion pump via a restrictive conductance. Said conductance has a very low value relative to the pumping speed of the pump, whereby a change in the pumping speed of the pump causes substantially no change in the pumping speed with which the gas sensing unit is evacuated, so that the output signal of said gas sensing unit is a true reflection of the gas entering said inlet, without distortion which would otherwise be caused by changes in pumping speed of said pump.

REFERENCES:
patent: 3355587 (1967-11-01), Jenckel
patent: 3683272 (1972-08-01), Vissers et al.
Freakes et al., "The Performance Characteristics of Three Types of Extreme High-Vacuum Gauges", Trans 10th A.V.S. Nat. Vac. Symp. 1963 pp. 257-262.
Moraw, G. "The Influence of Ionization Gauges on Gas Flow Measurement Vacuum", vol. 24 3-1974 pp. 125-128.
Loehrig et al. "Accurate Calibration of Vacuum Gauge to 10.sup.-9 to RR," Trans. 8th A.V.S. Nat. Vac. Symp. 1961 pp. 511-518.

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