Dual cantilever scanning probe microscope

Details Dual cantilever scanning probe microscope Dual cantilever scanning probe microscope

1998-03-25

2000-02-22

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

25055922, 250306, H01J 314

Patent

active

06028305&

ABSTRACT:
This microscope apparatus comprises two probes. The first probe is configured to interact with and measure characteristics of surfaces within an effective measurement distance of the first probe. This probe could be contact type, non-contact type, constant force mode, or constant height mode. A combination of actuation devices positions the first probe over a surface of a sample. The surface is scanned at high speeds in search of a target area. When a target area is found, a scanner moves the sample so that a second contact type probe with a sharp tip is positioned over the target area. The second probe is activated and the target area is scanned at low speeds and high resolution. The first and second probes are part of the same probe assembly. The probe assembly of the present invention does not require probe replacement as frequently as current assemblies because the sharp tip is used only at low speeds and high resolution configurations. Thus, the sharp tip wears slower than it would if the sharp tip was used to find the target feature as well.

REFERENCES:
patent: 5308974 (1994-05-01), Elings et al.
patent: 5742377 (1998-04-01), Minne et al.
patent: 5883705 (1999-03-01), Minne et al.
G. Binnig et al. "Review of Scientific Instruments", vol. 57, pp. 1688-1689, Aug. 1986.

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