Dual-bulge flexure ring for CMP head

Details Dual-bulge flexure ring for CMP head Dual-bulge flexure ring for CMP head

2005-02-01

2005-02-01

Nguyen, George (Department: 3723)

Abrading

Machine

Rotary tool

C451S041000, C451S285000, C451S286000, C451S398000

Reexamination Certificate

active

06848981

ABSTRACT:
A diaphragm flexure for a polishing head on a chemical mechanical polisher, particularly a Titan (TM) polishing head. The diaphragm flexure includes an annular flexure body having at least one bulge or protrusion formed in the upper surface thereof and at least one bulge or protrusion formed in the lower surface thereof. In assembly of the polishing head, each of the at least one inner and outer bulge or protrusion is inserted in a corresponding groove provided in a surface of an adjacent element of the polishing head. The elements in the polishing head are secured together with the flexure body typically by extending screws through respective screw openings in the elements and the flexure body.

REFERENCES:
patent: 4103901 (1978-08-01), Ditcher
patent: 4141180 (1979-02-01), Gill et al.
patent: 4864918 (1989-09-01), Martin
patent: 5228702 (1993-07-01), Browne et al.
patent: 5643061 (1997-07-01), Jackson et al.
patent: 6027125 (2000-02-01), Guest
patent: 6080050 (2000-06-01), Chen et al.
patent: 6295918 (2001-10-01), Simmons et al.
patent: 6514124 (2003-02-01), Zuniga et al.
patent: 6540594 (2003-04-01), Zuniga et al.
patent: 6602114 (2003-08-01), Wang et al.

Affiliated with

Also associated with

Rating

Dual-bulge flexure ring for CMP head does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Dual-bulge flexure ring for CMP head, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dual-bulge flexure ring for CMP head will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3463590