Optics: measuring and testing – Of light reflection – With diffusion
Reexamination Certificate
2006-08-04
2009-06-30
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Of light reflection
With diffusion
C356S445000, C356S236000
Reexamination Certificate
active
07554665
ABSTRACT:
A parousiameter having a dual beam setup and method for use thereof is provided for producing measurements of optical parameters. The dual beam parousiameter includes a hemispherical dome enclosure318sealed at the bottom with a base320. A radiation source302produces radiation in two beams, an illumination beam304for illuminating a sample surface308and a calibration beam330for providing optical characterization information about the illumination beam304. Each beam is guided into the hemispherical dome enclosure318via separate optical paths. An optical imaging device324is positioned to acquire an image of scatter radiation314scattered by the sample surface308illuminated by the illumination beam304, and acquire an image of the calibration beam, simultaneously. The calibration beam image is used to compensate for variability in optical output of the radiation source302when analyzing the scatter radiation data.
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Wadman et al., “Appearance Characterisation by a Scatterometer Employing a Hemispherical Screen”, Proceedings of SPIE, vol. 5189, Surface Scattering and Diffraction III., pp. 163-173, XP002360323.
Koninklijke Philips Electronics , N.V.
Nguyen Sang
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