Dual beam optical system for pulsed laser ablation film depositi

Details Dual beam optical system for pulsed laser ablation film depositi Dual beam optical system for pulsed laser ablation film depositi

1993-11-30

1996-09-24

Hoang, Tu

Electric heating

Metal heating

By arc

21912169, 21912175, 21912177, B23K 2600

Patent

active

055587887

ABSTRACT:
A laser ablation apparatus having a laser source outputting a laser ablation beam includes an ablation chamber having a sidewall, a beam divider for dividing the laser ablation beam into two substantially equal halves, and a pair of mirrors for converging the two halves on a surface of the target from complementary angles relative to the target surface normal, thereby generating a plume of ablated material emanating from the target.

REFERENCES:
patent: 4128752 (1978-12-01), Gravel
patent: 4315130 (1982-02-01), Inagaki et al.
patent: 4623776 (1986-11-01), Buchroeder et al.
patent: 4645900 (1987-02-01), Heyden
patent: 5029243 (1991-07-01), Damman et al.
patent: 5209944 (1993-05-01), Opower et al.
patent: 5223693 (1993-06-01), Zumoto et al.
patent: 5227608 (1993-07-01), Yoshida et al.
Materials Research Society (MRS), vol. 99; Entitled: High-Temperature Superconductors (A Symposium held Nov. 30-Dec. 4, 1987, Boston, Massachusetts, U.S.A.).
Pulsed Laser Deposition of Thin Superconducting Films of Ho.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7 -.sub.x and Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7 -.sub.x, by Geohegan et al. (Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN), J. Mater. Res. 3(6) Nov./Dec. 1988.
Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7 -.sub.x Laser-Ablation Plume Dynamics Measurement by Nanosecond Response Ion Probe: Comparison With Optical Measurements, by Mashburn et al. (Solid State Div. Oak Ridge National Lab., Oak Ridge, TN.) Revised Nov. 1989.
Appl. Phys. Lett. 55(22), 27 Nov. 1989 Entitled: Characterization of Ground-State Neutral and Ion Transport During Laser Ablation of Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7 -.sub.x Using Transient Optical Absorption Spectroscopy, by Geohegan, et al.
Characterization of Ground State Neutral and Ion Transport During Laser Ablation of 1:2:3 Superconductors by Transient Optical Absorption Spectroscopy, by Geohegan, et al., (Solid State Division Oak Ridge Nat'l Lab., Oak Ridge, TN) Nov. 1989.
Spectroscopic and Ion Probe Characterization of the Transport Process Following Laser Ablation of YBa.sub.2 Cu.sub.3 O.sub.x, by Geohegan et al., Apr., 1990 (Solid State Div. Oak Ridge National Lab., Oak Ridge, TN.).
High Quality Epitaxial YBaCu.sub.7-x Thin Films at Moderate Temperatures by Pulsed Laser Ablation, by Lowndes et al. (Solid State Division, Oak Ridge National Laboratory, Oak Ridge, TN).
Epitaxial Films of Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7 -.sub..delta. on NdGaO.sub.3, LaGaO.sub.3, and SrTiO.sub.3 Substrates Deposited by Laser Ablation, by Koren et al. (Received 21 Nov. 1988; accepted for publication Jan. 16, 1989) Appl. Phys. Lett 54 (11), 13 Mar. 1989, American Institute of Physics.
Epitaxial Growth of YBa.sub.2 Cu.sub.3 O.sub.7-x Thin Films by a Laser Evaporation Process, by Roas et al(Received 27 Jul. 1988; accepted for publication 26 Aug. 1988) Appl. Phys. Lett. 53 (16), 17 Oct. 1988, American Institute of Physics.
Y-Ba-Cu-O Thin Films Grown on Rigid and Flexible Polycrystalline Yttria-Stabilized Zirconia by Pulsed Laser Ablation; by Norton et al., Journal of Applied Physics 68, (1), pp. 223-227, 1990.
In-Situ Growth of Superconducting Yba.sub.2 Cu.sub.3 O.sub.y Films by Pulsed Laser Deposition, by Boyce et al., SPIE vol. 1187 Processing Films for High T.sub.c Superconducting Electronic (1989).
Layered Growth of HTSC Thin Films Using Pulsed Laser Deposition, by Kawai et al., SPIE vol. 1187 Processing of Films for High T.sub.c Superconducting Electronics (1989).
Physics of In-Situ Laser Deposition of Superconducting Thin Films, by Kwok et al. (Institute of Superconductivity State University of New York at Buffalo, Bonner Hall, Amherst, NY, SPIE vol. 1187 Processing Films for High T.sub.c Superconducting Electronic (1989).
Particulates Reduction in Laser-Ablated YBa.sub.2 Cu.sub.3 O.sub.7-.delta. Thin Films by Laser-Induced Plume Heating, by Koren et al. (Received 27 Oct. 1989; accepted for publication 27 Mar. 1990), Appl. Phys. Lett 56 (21), 21 May 1990; American Institute of Physics.
Artificial and Non-Equilibrium Materials Synthesizer Development, prepared by Mashburn et al. (Solid State Division Oak Ridge National Laboratory, Jun. 1990).
LPX The 5th Generation in Excimer Lasers, (Lambdaphysik--Lasertechnik, A Subsidiary of Coherent)--1988 Product Brochure.

Affiliated with

Also associated with

Rating

Dual beam optical system for pulsed laser ablation film depositi does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Dual beam optical system for pulsed laser ablation film depositi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dual beam optical system for pulsed laser ablation film depositi will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1926603