Dual beam frequency-output accelerometer

Details Dual beam frequency-output accelerometer Dual beam frequency-output accelerometer

2005-02-01

2005-02-01

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

06848307

ABSTRACT:
There is described an accelerometer which is fabricated utilizing a beam diaphragm sensor employing dielectrically isolated resonant beams. Each resonant beam is subject to an acceleration. One beam is an acceleration sensing beam and contains a mass which is coupled to the deflecting diaphragm. As the accelerometer is subjected to acceleration, the acceleration sensing beam will alter its resonant frequency according to the applied acceleration, while the other beam is immune to acceleration and therefore, provides a relatively fixed resonant frequency. One then takes the difference frequency between the two beams to obtain an output frequency signal which is relatively independent of temperature and/or biasing changes.

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