Dual bandwith bolometer

Radiant energy – Invisible radiant energy responsive electric signalling – Semiconductor system

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Details

2503384, 25033905, H01L 27144

Patent

active

060970316

ABSTRACT:
A dual function pixel of an array, having a large fill factor, for detecting visible light and infrared radiation through the same surface area of the pixel. Infrared radiation is absorbed by a conductive oxide layer. This absorbing layer heats up a heat detection layer which thereby indicates the impingement infrared radiation. An infrared reflecting layer made from a conductive oxide reflects infrared light passing through the absorbing layer, back to the absorbing layer. Visible light can pass through all of the layers of the pixel, which are optically transparent, to a visible light detector situated in the substrate of each pixel of the array.

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