Dual arm substrate transport apparatus

Details Dual arm substrate transport apparatus Dual arm substrate transport apparatus

2002-05-29

2009-08-25

Lowe, Michael S (Department: 3652)

Material or article handling

Horizontally swinging load support

Swinging about pivot

C414S744100, C414S744600, C414S941000, C901S015000

Reexamination Certificate

active

07578649

ABSTRACT:
A substrate transport apparatus comprising a drive section, an upper arm, a first forearm, and a second forearm. The upper arm is rotatably connected to the drive section at a first end of the upper arm. The upper arm is rotatably connected to the drive section for rotating the upper arm about an axis of rotation of the drive section. The first forearm is pivotably connected to the upper arm for pivoting relative to the upper arm. The first forearm has a first end effector depending therefrom. The second forearm is pivotably connected to the upper arm for pivoting relative to the upper arm. The second forearm has a second end effector depending therefrom.

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