Dual absolute pressure sensor and method thereof

Details Dual absolute pressure sensor and method thereof Dual absolute pressure sensor and method thereof

1994-05-03

1995-08-01

Raevis, Robert

Measuring and testing

Fluid pressure gauge

Diaphragm

73717, 73708, G01L 906

Patent

active

054371899

ABSTRACT:
A dual absolute pressure sensor independently converts first and second external pressures to first and second electrical signals respectively. A package body has first and second openings for receiving the first and second external pressures to outside surfaces of first and second sensor die attached to opposite surfaces of an internal glass substrate that separates the first and second openings. The first sensor die includes a first cavity having a reference pressure to measure against the first external pressure and develop a first differential pressure. A first piezoelectric network converts the first differential pressure to the first electrical signal representative of that pressure. The second sensor die includes a second cavity having a reference pressure to independently measure against the second external pressure and develop a second differential pressure. A second piezoelectric network converts the second differential pressure to the second electrical signal representative of that pressure.

REFERENCES:
patent: 4287501 (1981-09-01), Tominaga et al.
patent: 4499774 (1985-02-01), Tsuchiya et al.
patent: 4528855 (1985-07-01), Singh
patent: 4658651 (1987-04-01), Le
patent: 4771639 (1988-09-01), Saigusa et al.
patent: 5193394 (1993-03-01), Suda

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