Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Patent
1991-10-04
1994-03-08
Bennett, Henry A.
Drying and gas or vapor contact with solids
Apparatus
With means to treat gas or vapor
34 27, 34 15, 34 32, F26B 300
Patent
active
052916650
ABSTRACT:
Described herein are method and apparatus using a hot D.I. water bath for drying a wet work, for example, for draining and drying a wet work to dissipate water droplets completely from the work surface subsequent to a washing operation, permitting a high precision drying operation precluding disturbances by air bubbles of the water surface at the time of lifting the work out of the hot D.I. water bath. Prior to sending D.I. water to a heater, it is passed through a deaerator to reduce dissolved gas content to a level lower than a saturated solubility at a given temperature, and then heated to a predetermined temperature to prepare hot D.I. water for supply to the hot D.I. water bath; or alternatively D.I. water is heated to a predetermined temperature and supplied to a hot D.I. water bath through a water feed conduit via a bubble trapping chamber to remove air bubbles therefrom. A wet work is heated by immersion in the hot D.I. water bath and then lifted up to drain and dry same.
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Bennett Henry A.
Gromada Denise L.
Speedfam Clean Systems Co., Ltd.
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