Drying apparatus and method

Details Drying apparatus and method Drying apparatus and method

1997-09-23

1999-12-07

Bennett, Henry

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

F26B 2106

Patent

active

059962429

ABSTRACT:
A nozzle and an exhaust member are provided opposite to each other with an upward opening of a processing vessel interposed therebetween. A side wall of the processing vessel is smoothly curved inward as the opening is approached upward. The nozzle spouts a nitrogen gas fed from a nitrogen gas feeder as a jet for covering the opening toward an exhaust port of the exhaust member. The jet can effectively function as a curtain because the side wall of the processing vessel is curved. Therefore, a cooling coil necessary for a conventional apparatus is not required. Consequently, instability of the state of the IPA vapor caused by the cooling coil can be eliminated so that defective dryness is relieved or eliminated.

REFERENCES:
patent: 5183067 (1993-02-01), Slinn
patent: 5369891 (1994-12-01), Kamikawa
patent: 5535525 (1996-07-01), Gardner

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