Dry roughing pump having a gas film bearing

Expansible chamber devices – With lubricating means – Piston has lubricant retaining or conducting means

Patent

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Details

92159, 92160, 92162R, F01B 3110, F01B 3100

Patent

active

048739138

ABSTRACT:
The present invention relates to a cryopump having a gas bearing formed in a clearance seal between a piston and a cylinder. The gas bearing is formed by forcing pressurized gas from a gas plenum through orifices to the clearance seal.

REFERENCES:
patent: 3779672 (1973-12-01), Schroeder
patent: 4446702 (1984-05-01), Peterson
patent: 4545738 (1985-10-01), Young
patent: 4574591 (1986-03-01), Bertsch

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