Dry resist

Details Dry resist Dry resist

1995-06-12

1997-07-15

Ryan, Patrick

Stock material or miscellaneous articles

Web or sheet containing structurally defined element or...

Including a second component containing structurally defined...

428323, 428336, 428480, B32B 516, B32B 2706

Patent

active

056481594

ABSTRACT:
The disclosure describes a dry resist comprising:
a biaxially oriented laminated polyester film whose surface layer on at least one side contains particles having an average particle diameter of 0.01 to 3.0 .mu.m, and has a center line average roughness of not less than 0.005 .mu.m and a maximum height of less than 1.5 .mu.m, and which has a haze of not more than 1.5%;
a photoresist layer formed on said biaxially oriented laminated polyester film; and
a protective film formed on said photoresist layer.

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