Dry process for forming metal patterns wherein metal is deposite

Details Dry process for forming metal patterns wherein metal is deposite Dry process for forming metal patterns wherein metal is deposite

1983-07-26

1984-06-26

Newsome, John H.

Radiation imagery chemistry: process, composition, or product th

Stripping process or element

427 431, 427264, 427270, 427271, 430330, B05D 302

Patent

active

044566751

ABSTRACT:
A process for forming a desired metal pattern on a substrate which comprises, forming a mask of a thermally depolymerizable polymer on the substrate with a pattern of openings complementary to the desired metal pattern, blanket coating the substrate and the mask with a metal, heating the substrate to depolymerize the depolymerizable polymer, cooling the surface of the metal to thereby delaminate the metal coated in areas where thermally depolymerizable polymer is present, removing the delaminated metal where necessary, and optionally plasma ashing the depolymerized polymer, if residue thereof remains, to remove the same from said substrate.

REFERENCES:
patent: 3574657 (1971-04-01), Burnett
patent: 4296146 (1981-10-01), Penn
patent: 4307176 (1981-12-01), Mochiji
Anderson et al., IBM Tech. Disc. Bull., vol 22, #2, Jul. 1979, p. 541, 542.
Krevelen et al., "Properties of Polymers", pp. 459-466, Elsevier Scientific Publishing Co., New York, 1976.

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