Dry etching method, fine structure formation method, mold...

Details Dry etching method, fine structure formation method, mold... Dry etching method, fine structure formation method, mold...

2011-03-15

2011-03-15

Norton, Nadine G (Department: 1713)

Etching a substrate: processes

Forming or treating an article whose final configuration has...

C216S058000, C438S706000

Reexamination Certificate

active

07906030

ABSTRACT:
A WC substrate7is etched by using plasma50generated from a mixed gas of a gas including a halogen atom and a gas including a nitrogen atom.

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