Dry etching apparatus capable of monitoring motion of WAP...

Details Dry etching apparatus capable of monitoring motion of WAP... Dry etching apparatus capable of monitoring motion of WAP...

2006-01-24

2009-12-15

Cleveland, Michael (Department: 1792)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With measuring, sensing, detection or process control means

C156S345470, C156S915000, C033S366110

Reexamination Certificate

active

07632377

ABSTRACT:
An optical monitoring system includes a ring-shaped object suspended by and engaged with a plurality of vertical plunger shafts. Normally, the vertical plunger shafts move upward and downward reciprocally and coherently, but independently, such that the ring-shaped object ascends or descends horizontally. A light transceiver device is affixed to one vertical plunger shaft. A plurality optical reflector elements are affixed to respective other plunger shafts. A light beam emanated from said light transceiver is reflected by the optical reflector elements and is eventually re-directed back to the light transceiver device.

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patent: 1238261 (2005-08-01), None

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