Dry dispense of particles for microstructure fabrication

Details Dry dispense of particles for microstructure fabrication Dry dispense of particles for microstructure fabrication

1996-12-12

1998-10-06

Beck, Shrive

Fabric (woven, knitted, or nonwoven textile or cloth, etc.)

Woven fabric

Woven fabric is characterized by a particular or...

427468, 427469, 427282, 1566431, 216 42, 216 51, 216 72, B05D 106, B05D 132, C03C 2506

Patent

active

058173730

ABSTRACT:
A substrate is placed on a charging surface, to which a first voltage is applied. Etch-resistant dry particles are placed in a cup in a nozzle to which a second voltage, less than the first voltage, is applied. A carrier gas is directed through the nozzle, which projects the dry particles out of the nozzle toward the substrate. The particles pick up a charge from the potential applied to the nozzle and are electrostatically attracted to the substrate. The particles adhere to the substrate, where they form an etch mask. The substrate is etched and the particles are removed. Emitter tips for a field emission display may be formed in the substrate.

REFERENCES:
patent: 3556255 (1971-01-01), Lomax, Jr.
patent: 4407695 (1983-10-01), Deckman et al.
patent: 5312514 (1994-05-01), Kumar
patent: 5399238 (1995-03-01), Kumar
patent: 5411630 (1995-05-01), Nagase et al.
Advanced Display Systems, Inc., Richardson, Texas, "ASDM-05 Automatic Spacer Distributor Machine" No Date.
Thesis by Mark Allen Gilmore, Northeastern University, Boston, Massachusetts, Jul. 30, 1992, "The Application of Field Emitter Arrays to Gaseous Ion Production", pp. 1-107.

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