Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor
Reexamination Certificate
2007-04-24
2007-04-24
Gravini, S. (Department: 3749)
Drying and gas or vapor contact with solids
Apparatus
With means to treat gas or vapor
C062S094000, C096S125000
Reexamination Certificate
active
10528230
ABSTRACT:
Two rotors18a, 18beach housing a honeycomb structure25carrying an absorbent is driven for rotation by a common motor19. Partitioning members17define an absorbing zone S and a recovery zone U in the rotor depending on the angular positional relationship between the partitioning members17and the rotor corresponding thereto. In the absorbing zone S, the absorbent removes moisture and organic matters from air passing therethrough. In the recovery zone U, recovery of the absorbent deteriorated by absorbing the moisture and the organic matters is preformed by using heated dry air. Air sucked from a transfer space10of the processing system sequentially passes through the absorbing zones of both the rotors via a circulation passage20, thereafter returned to the transfer space. A part of clean dry air having passed through the absorbing zones of both the rotors is supplied into an exhaust passage21, and is heated by a heater, and passes through the recovery zones of both the rotors.
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International Preliminary Examination Report (PCT/IPEA/409) (Translated) for PCT/JP2003/012004.
Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report issued for PCT/JP2003/012004.
Asano Takanobu
Nakao Ken
Tanahashi Takashi
Yamashita Katsuhiro
Gravini S.
Nichias Corporation
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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