Droplet shape measuring method and apparatus

Details Droplet shape measuring method and apparatus Droplet shape measuring method and apparatus

2007-07-18

2009-02-03

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S239800

Reexamination Certificate

active

07486403

ABSTRACT:
In order to accurately measure a shape feature of a minute droplet arranged on a substrate by a simple method, with respect to the droplet, the substrate is perpendicularly irradiated with laser light to cause diffracted light fluxes generated during passage of the laser light through the droplet to interfere with each other, so that a diffraction pattern is obtained. The diffraction pattern formed on a screen of a detector as an image is picked up by an image pickup apparatus. The shape feature of the droplet is measured by using the resultant diffraction pattern and a refractive index of the droplet.

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