Droplet removing device and method in plasma generator

Gas separation: processes – Magnetic separation

Reexamination Certificate

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C096S002000

Reexamination Certificate

active

07976612

ABSTRACT:
A device for removing droplets in a plasma generator including a tubular traveling passage through which plasma and droplets travel under mixed state is formed, an aperture having a passing hole at an eccentric position is provided in the tubular traveling passage, and a magnetic field generator passing the plasma through the eccentric passing hole of the aperture arranged on an outer circumference of the tubular traveling passage. The plasma further passes through the eccentric passing hole of the aperture after being bent in the tubular traveling passage by a magnetic field generated from the magnetic field generator and the droplets are removed by colliding against the wall face of the aperture at the time of bending.

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Andre Anders, Robert A. MacGill, Twist filter for the removal of macroparticles from cathodic arc plasmas, Surface & Coatings Technology, 133-134, 2000, 96-100.

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