Driving method of spatial light modulator array, spatial...

Details Driving method of spatial light modulator array, spatial... Driving method of spatial light modulator array, spatial...

2007-12-04

2007-12-04

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S292000, C359S295000, C359S298000, C359S318000

Reexamination Certificate

active

11087642

ABSTRACT:
A driving method of a spatial light modulator array having plural spatial light modulators of micro-electro-mechanical system, the plural spatial light modulators each including: a movable part supported to be capable of being elastically displaced and provided with a movable electrode; and a fixed electrode disposed to face the movable part, wherein in a case where the voltages are applied to the electrodes and the movable part is driven and displaced in a fixed electrode direction, an absolute value of an inter-electrode voltage between the movable electrode and the fixed electrode is decreased while the movable part is transitioning in a direction of the fixed electrode.

REFERENCES:
patent: 5212582 (1993-05-01), Nelson
patent: 6985278 (2006-01-01), Chu et al.
patent: 6-124341 (1994-05-01), None
patent: 8-334709 (1996-12-01), None
patent: 9-238106 (1997-09-01), None

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