Driving mechanism having a pressure member

Details Driving mechanism having a pressure member Driving mechanism having a pressure member

1988-02-29

1989-10-10

Braun, Leslie A.

Machine element or mechanism

Mechanical movements

Reciprocating to or from oscillating

74107, F16H 2518

Patent

active

048723584

ABSTRACT:
A driving mechanism having a driving shaft, which is rotatable about a first axis and on which a pressure member is located. The pressure member has a first roller segment which engages a fixed support and a second roller segment which engages an adjustment member. The adjustment member can be coupled to a load displaceable parallel to a second axis. The driving mechanism is particularly suitable for comparatively small and accurate displacements of a load, such as, for example, a mask table in an opto-lithographic apparatus.

REFERENCES:
patent: 2674904 (1954-04-01), Dickson
patent: 3199359 (1965-08-01), Beezer
patent: 3424279 (1969-01-01), Frigger
patent: 3469660 (1969-09-01), Mathers
patent: 3997033 (1976-12-01), Bulmer

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