Driving device, exposure apparatus using the same, and...

Details Driving device, exposure apparatus using the same, and... Driving device, exposure apparatus using the same, and...

2006-07-13

2009-10-13

Le, Thanh-Tam T (Department: 2839)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S013000

Reexamination Certificate

active

07602086

ABSTRACT:
A driving device includes an electromagnetic actuator indicating a first coil and a second coil which detects a change in magnetic flux generated by the first coil, and an electromagnetic actuator controller which feedback-controls the electromagnetic actuator. The electromagnetic actuator controller includes a modulator which gives a modulated signal, which is generated based on a target value in the feedback control, to the first coil, and a demodulator which demodulates an output signal from the second coil, and in which the target value is a target thrust of the electromagnetic actuator. The electromagnetic actuator controller includes a scale converter which performs a square-root arithmetic operation for the target value to feedback-control the electromagnetic actuator based on an output signal from the scale converter and a signal demodulated by the demodulator.

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