Driving apparatus, holding apparatus, exposure apparatus,...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices

Reexamination Certificate

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C310S311000

Reexamination Certificate

active

08080917

ABSTRACT:
A driving apparatus, which drives an object, includes a plurality of piezoelectric elements configured to drive a plurality of portions of the object, a plurality of voltage apply units configured to apply voltages to the plurality of piezoelectric elements, and a control unit configured to control the plurality of voltage apply units so that differences among the voltages applied to the plurality of piezoelectric elements do not exceed a predetermined value.

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Korean Office Action dated Feb. 2, 2010, issued in corresponding Korean patent application No. 10-2008-0035870.

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