Driving apparatus, exposure apparatus, and device...

Electricity: motive power systems – Positional servo systems – Program- or pattern-controlled systems

Reexamination Certificate

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Details

C318S560000, C318S632000, C318S649000, C318S671000, C355S053000, C355S057000, C355S072000

Reexamination Certificate

active

11031021

ABSTRACT:
A driving apparatus for moving an object. The apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter which receives a reaction force generated when the first actuator drives the object, and a controller which controls the second actuator on the basis of X- and Y-direction positions of the object and X- and Y-direction accelerations of the object so as to cancel, by the second actuator, the reaction force to be received by the reaction force counter when the object is driven by the first actuator.

REFERENCES:
patent: 3886421 (1975-05-01), Hassan et al.
patent: 3904945 (1975-09-01), Hassan et al.
patent: 4016396 (1977-04-01), Hassan et al.
patent: 5172160 (1992-12-01), Van Eijk et al.
patent: 5260580 (1993-11-01), Itoh et al.
patent: 5446519 (1995-08-01), Makinouchi
patent: 5684856 (1997-11-01), Itoh et al.
patent: 5744924 (1998-04-01), Lee
patent: 5838443 (1998-11-01), Sekiguchi
patent: 6025688 (2000-02-01), Sekiguchi
patent: 6072183 (2000-06-01), Itoh et al.
patent: 6400117 (2002-06-01), Okazaki
patent: 6504160 (2003-01-01), Itoh et al.
patent: 6570645 (2003-05-01), Korenaga et al.
patent: 6654098 (2003-11-01), Asano et al.
patent: 6717653 (2004-04-01), Iwamoto et al.
patent: 6844694 (2005-01-01), Binnard
patent: 6891597 (2005-05-01), Sekiguchi
patent: 6927838 (2005-08-01), Ono et al.
patent: 2001/0045526 (2001-11-01), Itoh et al.
patent: 2003/0197850 (2003-10-01), Sekiguchi
patent: 5-77126 (1993-03-01), None
patent: 5-121294 (1993-05-01), None
patent: 2003-318082 (2003-11-01), None

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