Driving apparatus and exposure apparatus

Details Driving apparatus and exposure apparatus Driving apparatus and exposure apparatus

2007-07-03

2007-07-03

Perkey, W. B. (Department: 2851)

Electrical generator or motor structure

Dynamoelectric

Linear

C355S030000, C355S072000

Reexamination Certificate

active

11074710

ABSTRACT:
A driving apparatus which drives an object. The apparatus includes an electromagnetic actuator having a movable element and a stator, a surrounding member surrounding a heat portion of the electromagnetic actuator, a beam which provides the object with a driving force in accordance with movement of the movable element, a connecting member connecting the movable element and the beam, wherein the surrounding member has an opening allowing the movement of the movable element, the opening being arranged at a portion of the surrounding member not facing the object, and a heat recovery unit arranged at a position facing the opening.

REFERENCES:
patent: 5998890 (1999-12-01), Sedgewick et al.
patent: 6864602 (2005-03-01), Korenaga
patent: 2003/0040831 (2003-02-01), Tanaka et al.
patent: 2003/0102723 (2003-06-01), Korenaga
patent: 2003-116260 (2003-04-01), None

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