Optics: measuring and testing – By polarized light examination – With birefringent element
Reexamination Certificate
2004-01-23
2008-08-12
Punnoose, Roy M (Department: 2886)
Optics: measuring and testing
By polarized light examination
With birefringent element
C356S364000, C356S369000
Reexamination Certificate
active
07411677
ABSTRACT:
A small and high-speed polarization analysis device and ellipsometer having no driving section are provided by overlapping one polarizer array rendered by arranging a plurality of polarizer regions of mutually different optical axis directions in the form of stripes and one wavelength plate array rendered by arranging a plurality of wavelength plate regions of fixed retardation and mutually different optical axis directions in the form of stripes so that the respective stripes of the plurality of polarizer regions and of the plurality of wavelength plate regions intersect one another and by disposing a light-receiving element array so that the intensities of light that has passed through the matrix-like intersection parts can be individually measured. As a method of analyzing a two-dimensional intensity distribution pattern that is observed by the light-receiving element array of the polarization analysis device, either one of (or both of) the algorithms of a method that determines incident polarized waves by mathematically fitting pattern shapes or performing database matching or a method that performs a Fourier transform on pattern shapes and determines incident polarized waves from the frequency components is (are) used. Furthermore, if necessary, more accurate polarization analysis is also possible by adopting a signal processing method that removes signals from light-receiving element regions that receive unnecessary scattered light and diffracted light.
REFERENCES:
patent: 4158506 (1979-06-01), Collett
patent: 5327285 (1994-07-01), Faris
patent: 5416324 (1995-05-01), Chun
patent: 5479015 (1995-12-01), Rudman et al.
patent: 6075235 (2000-06-01), Chun
patent: 4-147040 (1992-05-01), None
patent: 2002-116085 (2002-04-01), None
International Search Report of PCT/JP2004/000633 dated Apr. 20, 2004.
Hashimoto Naoki
Kawakami Shojiro
Sasaki Yoshihiro
Sato Takashi
Japan Science and Technology Agency
Photonic Lattice Inc.
Punnoose Roy M
Westerman, Hattori, Daniels & Adrian , LLP.
LandOfFree
Driverless ellipsometer and ellipsometry does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Driverless ellipsometer and ellipsometry, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Driverless ellipsometer and ellipsometry will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3993649