Drive-section-isolated FOUP opener

Details Drive-section-isolated FOUP opener Drive-section-isolated FOUP opener

2006-04-04

2006-04-04

Lillis, Eileen D. (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

C414S416060

Reexamination Certificate

active

07021882

ABSTRACT:
A drive-section-isolated FOUP opener opens and closes a door of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and positioning the FOUP; a dock moving mechanism for moving the dock plate to a position for detachment/attachment of the FOUP door; a port door including a mechanism for releasably holding the FOUP door; a port plate including an opening closed by the port door; a port door horizontal-movement mechanism for horizontally moving the port door; a sensor horizontal-movement mechanism for horizontally moving a sensor bracket, the sensor bracket carrying a mapping sensor; and a port-door-and-sensor vertical-movement mechanism for vertically moving the port door and the sensor bracket with the port door holding the FOUP door. A drive for the port door horizontal-movement mechanism, a drive for the sensor horizontal-movement mechanism, and a drive for the port-door-and-sensor vertical-movement mechanism are disposed opposite a clean room with respect to the port plate.

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