Drive electrodes for microfabricated torsional cantilevers

Details Drive electrodes for microfabricated torsional cantilevers Drive electrodes for microfabricated torsional cantilevers

1998-03-23

1999-12-14

Larkin, Daniel S.

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

060002808

ABSTRACT:
A comb-type actuator for movable microelectromechanical structures includes first and second asymmetric sets of interdigitated fingers. Asymmetry is obtained by fabricating on set of fingers to have a greater height than the other set, or by providing electrically insulating segments in one set. Application of a voltage across the sets produces an asymmetric field between them and produces relative motion.

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