Drive control method and unit for micro machine device

Details Drive control method and unit for micro machine device Drive control method and unit for micro machine device

2011-06-14

2011-06-14

Nguyen, Danny (Department: 2836)

Electricity: electrical systems and devices

Control circuits for electromagnetic devices

C361S160000

Reexamination Certificate

active

07961448

ABSTRACT:
A drive control method for a micro machine device is provided. The micro machine device is made up of first and second electrodes opposed to each other and a dielectric layer disposed between them. The drive control method includes the steps of applying a control voltage between the first and the second electrodes so that an electrostatic force is exerted on the first and the second electrodes for displacing the first or the second electrode, and switching polarity of the control voltage at a predetermined period or a shorter period.

REFERENCES:
patent: 5155573 (1992-10-01), Abe et al.
patent: 6391675 (2002-05-01), Ehmke et al.
patent: 6509745 (2003-01-01), Marszalek
patent: 6670864 (2003-12-01), Hyvonen et al.
patent: 6806988 (2004-10-01), Onuki et al.
patent: 7027282 (2006-04-01), Ryhanen et al.
patent: 7142072 (2006-11-01), Katta
patent: 7227431 (2007-06-01), Katta
patent: 7283018 (2007-10-01), Katta
patent: 2001/0054937 (2001-12-01), Hyvonen et al.
patent: 2002/0047491 (2002-04-01), Hirose et al.
patent: 2002/0066659 (2002-06-01), Ryhanen et al.
patent: 2004/0040828 (2004-03-01), Ivanciw et al.
patent: 2005/0104680 (2005-05-01), Katta
patent: 2005/0132806 (2005-06-01), Lee et al.
patent: 2006/0125746 (2006-06-01), Sallese et al.
patent: 2006/0127085 (2006-06-01), Matsuki et al.
patent: 2007/0018744 (2007-01-01), Katta
patent: 2007/0018750 (2007-01-01), Katta
patent: 2 406 186 (2001-10-01), None
patent: 0 909 024 (1999-04-01), None
patent: 0909024 (1999-04-01), None
patent: 1 146 532 (2001-10-01), None
patent: 1 168 608 (2002-01-01), None
patent: 3-284817 (1991-12-01), None
patent: 8-107245 (1996-04-01), None
patent: 2002-36197 (2002-02-01), None
patent: 2002-84148 (2002-03-01), None
patent: 2004-140597 (2004-05-01), None
patent: 2005-184270 (2005-07-01), None
patent: 10-2005/0063238 (2005-06-01), None
patent: WO 00/31819 (2000-06-01), None
patent: WO 01/80266 (2001-10-01), None
Office Action dated Oct. 29, 2009 corresponding to Korean Patent Application No. 10-2008-0018587.
Chinese Office Action dated Mar. 10, 2010 with its English translation.
Jason Yao J et al: “Topical Review; RF MEMS from a device perspective; Topical review” Dec. 1, 2000, Journal of Micromechanics & Microengineering, Institute of Physics Publishing, Bristol, GB, pp. R9-R38, XP020068606 ISSN: 0960-1317.
Red J R et al: “Measurements of charging in capacitive microelectromechanical switches” Electronics Letters, IEE Stevenage, GB, vol. 38, No. 24, Nov. 21, 2002, pp. 1544-1545, XP006019362 ISSN: 0013-5194.
European Search Report dated Feb. 10, 2009.
European Official Communication dated Feb. 10, 2009 for corresponding European patent application No. 08100445.9.
Office Action dated Mar. 30, 2010 corresponding to Japanese Patent Application No. 2007-094063.
“Chinese Official Communication”, mailed by Chinese Patent Office and corresponding to Chinese application No. 200810008706.7 on Jul. 27, 2010, with English translation.
“US Official Communication”, (KITOV) Non-Final Rejection, Jul. 16, 2010, in corresponding U.S. Appl. No. 12/071,945 [pending].
Rebeiz, Gabriel M. “RF MEMS Theory, Design and Technology”, 2003, pp. 383-429 (previously submitted to Examiner Dec. 19, 2008).
Sallese, Jean-Michel “Switch and RF ferroelectric MEMS: a new concept”, 2003, Elsevier, Sensors and Actuators, 109 (2004), pp. 186-194.

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