Drive control apparatus

Details Drive control apparatus Drive control apparatus

1996-09-04

1998-05-26

Stephan, Steven L.

Electricity: motive power systems

Linear-movement motors

318687, 437924, H02K 4100, H01L 2168, B65G 4907

Patent

active

057571490

ABSTRACT:
A target state quantity generating unit generates a target state quantity for a stage, and a laser interferometer detects the current state quantity (position) of the stage. Based on the target state quantity and the detected state quantity (position), a compensation system constituted by a variable phase compensator and a PID compensator controls the driving operation of the stage. A memory unit stores forward and reverse gain tables, and provides adjustment information for adjusting the compensation system in correspondence with the state quantity of the stage. The corresponding gain table is selected on the basis of the driving direction of the stage, and the adjustment information is read out from the selected gain table on the basis of the position of the stage. The corner frequency of the variable phase compensator is changed on the basis of the readout adjustment information.

REFERENCES:
patent: 4496239 (1985-01-01), Isohata et al.
patent: 4659227 (1987-04-01), Sato et al.
patent: 4677474 (1987-06-01), Sato et al.
patent: 4714400 (1987-12-01), Barnett et al.
patent: 4747608 (1988-05-01), Sato et al.
patent: 4870288 (1989-09-01), Abuku et al.
patent: 5216590 (1993-06-01), Ota
patent: 5270771 (1993-12-01), Sato
patent: 5499099 (1996-03-01), Sato et al.
patent: 5504407 (1996-04-01), Wakui et al.
patent: 5511930 (1996-04-01), Sato et al.
patent: 5557156 (1996-09-01), Elings
patent: 5609136 (1997-03-01), Tuken

Affiliated with

Also associated with

Rating

Drive control apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Drive control apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Drive control apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1965503