Optics: measuring and testing – Standard
Reexamination Certificate
2008-09-23
2008-09-23
Pham, Hoa Q (Department: 2886)
Optics: measuring and testing
Standard
C356S625000, C702S104000, C702S127000, C700S121000
Reexamination Certificate
active
11601038
ABSTRACT:
Drift in an optical metrology tool is compensated for by obtaining a first measured diffraction signal and a second measured diffraction signal of a first calibration structure mounted on the optical metrology tool. The first and second measured diffraction signals were measured using the optical metrology tool. The second measured diffraction signal was measured later in time than the first measured diffraction signal. A first drift function is generated based on the difference between the first and second measured diffraction signals. A third measured diffraction signal is obtained of a first structure formed on a first wafer using the optical metrology tool. A first adjusted diffraction signal is generated by adjusting the third measured diffraction signal using the first drift function.
REFERENCES:
patent: 6785638 (2004-08-01), Niu et al.
patent: 6792328 (2004-09-01), Laughery et al.
patent: 6850858 (2005-02-01), West et al.
patent: 6891626 (2005-05-01), Niu et al.
patent: 6943900 (2005-09-01), Niu et al.
patent: 2003/0223072 (2003-12-01), Schulz
patent: 2004/0267397 (2004-12-01), Doddi et al.
patent: 2007/0211260 (2007-09-01), Vuong et al.
patent: 2007/0268497 (2007-11-01), Stanke et al.
patent: 2007/0268498 (2007-11-01), Stanke et al.
Ausschnitt, C. P. (Feb. 23, 2004). “A New Approach to Pattern Metrology,”Proceedings of SPIE5375:51-65.
U.S. Appl. No. 11/371,752, filed Mar. 8, 2006 for Vuong et al.
Chen Yan
Tuitje Holger
Vuong Vi
Morrison & Foerster / LLP
Pham Hoa Q
Tokyo Electron Limited
LandOfFree
Drift compensation for an optical metrology tool does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Drift compensation for an optical metrology tool, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Drift compensation for an optical metrology tool will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3913070