Drift compensation for an optical metrology tool

Details Drift compensation for an optical metrology tool Drift compensation for an optical metrology tool

2008-09-23

2008-09-23

Pham, Hoa Q (Department: 2886)

Optics: measuring and testing

Standard

C356S625000, C702S104000, C702S127000, C700S121000

Reexamination Certificate

active

11601038

ABSTRACT:
Drift in an optical metrology tool is compensated for by obtaining a first measured diffraction signal and a second measured diffraction signal of a first calibration structure mounted on the optical metrology tool. The first and second measured diffraction signals were measured using the optical metrology tool. The second measured diffraction signal was measured later in time than the first measured diffraction signal. A first drift function is generated based on the difference between the first and second measured diffraction signals. A third measured diffraction signal is obtained of a first structure formed on a first wafer using the optical metrology tool. A first adjusted diffraction signal is generated by adjusting the third measured diffraction signal using the first drift function.

REFERENCES:
patent: 6785638 (2004-08-01), Niu et al.
patent: 6792328 (2004-09-01), Laughery et al.
patent: 6850858 (2005-02-01), West et al.
patent: 6891626 (2005-05-01), Niu et al.
patent: 6943900 (2005-09-01), Niu et al.
patent: 2003/0223072 (2003-12-01), Schulz
patent: 2004/0267397 (2004-12-01), Doddi et al.
patent: 2007/0211260 (2007-09-01), Vuong et al.
patent: 2007/0268497 (2007-11-01), Stanke et al.
patent: 2007/0268498 (2007-11-01), Stanke et al.
Ausschnitt, C. P. (Feb. 23, 2004). “A New Approach to Pattern Metrology,”Proceedings of SPIE5375:51-65.
U.S. Appl. No. 11/371,752, filed Mar. 8, 2006 for Vuong et al.

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