Dressing apparatus and polishing apparatus

Details Dressing apparatus and polishing apparatus Dressing apparatus and polishing apparatus

2005-05-31

2005-05-31

Nguyen, Dung Van (Department: 3723)

Abrading

Machine

Combined

C451S443000, C451S444000

Reexamination Certificate

active

06899604

ABSTRACT:
A dressing apparatus dresses a polishing surface of a polishing table used for polishing a workpiece such as a semiconductor wafer in a polishing apparatus. The dressing apparatus comprises a dresser body (31) connected to a dresser drive shaft (23) which is vertically movable, a dresser plate (32) which is vertically movable with respect to the dresser body (31), and a dressing member (22) held by the dresser plate (32) for dressing the polishing surface (1a).

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