Drawing machines especially for integrated circuit masks

Photocopying – Contact printing – Light boxes

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Details

350356, 355 53, G02B 523, G03B 4100, G03B 2742

Patent

active

041107624

ABSTRACT:
A machine for drawing on a photographic plate and especially for integrated ircuit masks comprises an electro-optical imager having an optical axis x-x', means for controlling the optical state of each point which has dimensions corresponding to the smallest detail to be drawn on the plate, the entire light beam issuing from the imager being applied to an objective which provides a magnification n and has an axis corresponding to the optic axis. Means for producing the relative displacement of the imager and of the photosensitive plate in a plane at right angles to the optic axis and in two orthogonal directions are controlled as a function of indications supplied by means for measuring the relative displacement.

REFERENCES:
patent: 3632205 (1972-01-01), Marcy
patent: 3704946 (1972-12-01), Brault et al.
patent: 3722996 (1973-03-01), Fox
patent: 3722998 (1973-03-01), Morse
patent: 3797935 (1974-03-01), Marcy
patent: 3806230 (1974-04-01), Haas
patent: 3824604 (1974-07-01), Stein
patent: 3848247 (1974-11-01), Sherr
patent: 3881098 (1975-04-01), Rich
patent: 3897137 (1975-07-01), Dobbins
Electronics Review, 4/17/1967, vol. 40, No. 8, pp. 47 & 48, Boosting IC's.

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