Electricity: electrothermally or thermally actuated switches – Electrothermally actuated switches – With bimetallic elements
Reexamination Certificate
2007-10-16
2007-10-16
Vortman, Anatoly (Department: 2835)
Electricity: electrothermally or thermally actuated switches
Electrothermally actuated switches
With bimetallic elements
C337S139000, C337S141000, C361S163000, C060S529000, C310S307000, C347S056000
Reexamination Certificate
active
10999645
ABSTRACT:
A doubly-anchored thermal actuator for a micro-electromechanical device such as a liquid drop emitter or a fluid control microvalve is disclosed. The thermal actuator is comprised of a base element formed with a depression having opposing anchor. A deformable element, attached to the base element at the opposing anchor edges, is constructed as a planar lamination including a first layer of a first material having a low coefficient of thermal expansion and a second layer of a second material having a high coefficient of thermal expansion. The deformable element has anchor portions adjacent the anchor edges and a central portion between the anchor portions wherein the flexural rigidity of the anchor portions is substantially less than the flexural rigidity of the central portion. The doubly-anchored thermal actuator further comprises apparatus adapted to apply a heat pulse to the deformable element that causes a sudden rise in the temperature of the deformable element. The deformable element bows outward in a direction toward the second layer, and then relaxes to a residual shape as the temperature decreases. The doubly-anchored thermal actuator is configured with a liquid chamber having a nozzle or a fluid flow port to form a liquid drop emitter or a fluid control microvalve, or to activate an electrical microswitch. Heat pulses are applied to the deformable element by resistive heating or by light energy pulses.
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Cabal Antonio
Pond Stephen F.
Eastman Kodak Company
Vortman Anatoly
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