Photocopying – Projection printing and copying cameras – Detailed holder for original
Patent
1992-01-27
1993-12-21
Hayes, Monroe H.
Photocopying
Projection printing and copying cameras
Detailed holder for original
355 26, 355 73, 355 87, 355 91, 355 93, G03B 2762, G03B 2764
Patent
active
052725022
ABSTRACT:
Both surfaces of a substrate formed with a resist or a thin film sample can be exposed concurrently and either one surface exposure or both surface concurrent exposure of the sample can be carried out. The first groove for use in fixing the flat plate holder of transparent material held by a frame to the frame under a suction of vacuum and fixing is formed at a lower circumferential edge of the flat plate holder, the second groove for sucking by vacuum and fixing the mask film on the upper surface of the flat plate holder is formed at the upper surface of the flat plate holder and at the same time there is provided a seal member for sealing a clearance between the mask film and the end part of the sample formed with a resist position aligned to each other, and suction holes for use in sucking by vacuum and fixing the lower surface of the end part of the sealed sample are communicated with each of the seal member, mask film and the flat plate holder in a sample holding device of the exposure device.
REFERENCES:
patent: 3512487 (1970-05-01), Kranz et al.
patent: 4565443 (1986-01-01), Yazaki
patent: 4721980 (1988-01-01), Yazaki
patent: 4827316 (1989-05-01), Brown
patent: 5017960 (1991-05-01), Tuulse
LandOfFree
Double-surface concurrent exposure device does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Double-surface concurrent exposure device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Double-surface concurrent exposure device will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-311994