Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-03-07
2006-03-07
Thompson, Timothy (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000, C359S223100, C359S224200
Reexamination Certificate
active
07009754
ABSTRACT:
A spatial light modulator includes an upper optically transmissive substrate held above a lower substrate containing addressing circuitry. One or more electrostatically deflectable elements are suspended by hinges from the upper substrate. In operation, individual mirrors are selectively deflected and serve to spatially modulate light that is incident to, and then reflected back through, the upper substrate. Motion stops may be attached to the reflective deflectable elements so that the mirror does not snap to the bottom substrate. Instead, the motion stop rests against the upper substrate thus limiting the deflection angle of the reflective deflectable elements.
REFERENCES:
patent: 3517126 (1970-06-01), Yamada et al.
patent: 3553364 (1971-01-01), Lee
patent: 3600798 (1971-08-01), Lee
patent: 3678196 (1972-07-01), Roth
patent: 3746785 (1973-07-01), Goodrich
patent: 3746911 (1973-07-01), Nathanson et al.
patent: 3886310 (1975-05-01), Guldberg et al.
patent: 4229732 (1980-10-01), Hartstein et al.
patent: 4280107 (1981-07-01), Scifres et al.
patent: 4356730 (1982-11-01), Cade
patent: 4383255 (1983-05-01), Grandjean et al.
patent: 4403248 (1983-09-01), Te Velde
patent: 4420897 (1983-12-01), Castleberry
patent: 4492435 (1985-01-01), Banton et al.
patent: 4566935 (1986-01-01), Hornbeck
patent: 4571603 (1986-02-01), Hornbeck et al.
patent: 4592628 (1986-06-01), Altman et al.
patent: 4596992 (1986-06-01), Hornbeck
patent: 4662746 (1987-05-01), Hornbeck
patent: 4677311 (1987-06-01), Morita
patent: 4680579 (1987-07-01), Ott
patent: 4698602 (1987-10-01), Armitage
patent: 4710732 (1987-12-01), Hornbeck
patent: 4786149 (1988-11-01), Hoenig et al.
patent: 4805038 (1989-02-01), Seligson
patent: 4954789 (1990-09-01), Sampsell
patent: 4956619 (1990-09-01), Hornbeck
patent: 4998262 (1991-03-01), Wiggers
patent: 5061049 (1991-10-01), Horbeck
patent: 5078479 (1992-01-01), Vuilleumier
patent: 5085497 (1992-02-01), Um et al.
patent: 5196767 (1993-03-01), Leard et al.
patent: 5216537 (1993-06-01), Hornbeck
patent: 5285407 (1994-02-01), Gale et al.
patent: 5287215 (1994-02-01), Warde et al.
patent: 5303190 (1994-04-01), Pelley, III
patent: 5311360 (1994-05-01), Bloom et al.
patent: 5416514 (1995-05-01), Janssen et al.
patent: 5442414 (1995-08-01), Janssen et al.
patent: 5444566 (1995-08-01), Gale et al.
patent: 5448314 (1995-09-01), Heimbuch et al.
patent: 5452024 (1995-09-01), Sampsell
patent: 5471341 (1995-11-01), Warde et al.
patent: 5493439 (1996-02-01), Engle
patent: 5508738 (1996-04-01), Janssen et al.
patent: 5517347 (1996-05-01), Sampsell
patent: 5535047 (1996-07-01), Hornbeck
patent: 5552925 (1996-09-01), Worley
patent: 5557177 (1996-09-01), Engle
patent: 5567334 (1996-10-01), Baker et al.
patent: 5579149 (1996-11-01), Moret et al.
patent: 5579151 (1996-11-01), Cho
patent: 5583688 (1996-12-01), Hornbeck
patent: 5631782 (1997-05-01), Smith et al.
patent: 5636070 (1997-06-01), Ji et al.
patent: 5669687 (1997-09-01), Yang
patent: 5677784 (1997-10-01), Harris
patent: 5706061 (1998-01-01), Marshall et al.
patent: 5745193 (1998-04-01), Urbanus et al.
patent: 5768009 (1998-06-01), Little
patent: 5774196 (1998-06-01), Marshall
patent: 5784190 (1998-07-01), Worley
patent: 5808780 (1998-09-01), McDonald
patent: 5835256 (1998-11-01), Huibers
patent: 5926309 (1999-07-01), Little
patent: 5999306 (1999-12-01), Atobe et al.
patent: 6046840 (2000-04-01), Huibers
patent: 6053617 (2000-04-01), Kaeriyama
patent: 6107115 (2000-08-01), Atobe et al.
patent: 6356378 (2002-03-01), Huibers
Jaecklin, “Line-Addressable Torsional Micromirrors for Light Modulator Arrays”, Sensor and Actuators A, 41-42, Elsevier Science, pp. 324-329.
Gerhard-Multhaupt et al., “Light-Valve Projection Displays—An Introduction”, Displays, vol. 16, No. 1, 1995, Elsevier Science B.V., pp. 5-7.
Gerhard-Multhaupt , “Light-Valve Technologies for High-Definition Television Projection Displays”, Displays, 1991, vol. 12, No. 3/4, pp. 115-128.
Peterson, K.E., “Micromechanical Light Modulator Array Fabricated on Silicon”, Applied Physics Letters, American Institute of Physics, vol. 31 No. 8, Oct. 15, 1977, pp. 521-523.
Cadman et al., “New Micromechanical Display Using Metallic Thin Films”, IEEE Electron Device Letters, Jan. 1983, vol. EDL-4 No. 1, pp. 3-4.
Thomas et al., “The Mirror Matrix Tube: A Novel Light Valve for Projection Displays”, IEEE Transactions on Electron Devices, vol. Ed-22 No. 9, Sep. 1975, pp. 765-775.
Hornbeck, “Digital Light Processing (TM) for High-Brightness, High Resolution Applications”, Texas Instruments, Inc., date unknown, pp. 1-14.
Yoder, “The Digital Display Technology of the Future”, Texas Instruments, Inc., date unknown, pp. 1-11.
Peterson, “Silicon Torsional Scanning Mirror”, IBM J. Res. Develop., vol. 24 No. 5, Sep. 1980 pp. 631-637.
Muir Gregory R.
Reflectivity, INC
Thompson Timothy
LandOfFree
Double substrate reflective spatial light modulator with... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Double substrate reflective spatial light modulator with..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Double substrate reflective spatial light modulator with... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3585989