Double substrate reflective spatial light modulator with...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S290000, C359S223100, C359S224200

Reexamination Certificate

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07023607

ABSTRACT:
A spatial light modulator including first and second substrate, and an array of deflectable elements disposed within a gap between the first and second substrates is disclosed herein. For electrostatically actuating the deflectable elements, an array of electrodes and circuitry is provided and positioned proximate to the deflectable elements.

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