Double-sided radiation-assisted processing apparatus

Details Double-sided radiation-assisted processing apparatus Double-sided radiation-assisted processing apparatus

1991-03-12

1992-01-21

Anderson, Bruce C.

Radiant energy

Supported for nonsignalling objects of irradiation

2504521, G01N 2100

Patent

active

050830309

ABSTRACT:
A double-sided radiation-assisted processing apparatus includes a planar radiation source having first and second sides and providing radiation having an intensity I.sub.O at the surface of substrates provided on both the first and second sides of the radiation source. Accordingly, the radiation intensity utilized for processing is 2I.sub.O.

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