Double sided polishing machine

Details Double sided polishing machine Double sided polishing machine

2006-09-05

2006-09-05

Rose, Robert A. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Controlling temperature

C451S268000, C451S488000

Reexamination Certificate

active

07101258

ABSTRACT:
Double-sided polishing machine with an upper and a lower working disc, each comprising a polishing disc and a carrier disc. The working disc are co-axially arranged and rotatable relative to each other, a polishing gap being formed between the polishing discs. Said workpieces are machined in the polishing gap. A temperature control device being at least provided for the upper working disc by which a temperature control fluid can be conveyed through passages in the upper working disc. A spacing measuring device being associated with the working discs which measure the spacing in the polishing gap (gap width μ) at two radial spaced points of the polishing gap.

REFERENCES:
patent: 4007560 (1977-02-01), Janssen
patent: 4315383 (1982-02-01), Day
patent: 4450652 (1984-05-01), Walsh
patent: 4471579 (1984-09-01), Bovensiepen
patent: 5782678 (1998-07-01), Cesna et al.
patent: 6544111 (2003-04-01), Kimura et al.

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