Double side probing of semiconductor devices

Details Double side probing of semiconductor devices Double side probing of semiconductor devices

2006-12-05

2006-12-05

Karlsen, Ernest (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S754120, C324S762010

Reexamination Certificate

active

07145353

ABSTRACT:
A probe head for testing the properties of a semiconducting device (10) under test including a dielectric film (24) supporting at least one semiconducting device (10) under test with a support frame (26) tautly supporting the dielectric film (24). A first support (40) positions a first probe (28) for electrically contacting a first side (16) of the semiconducting device (10) under test and a second support (34), having a actuator to move a second probe (30) between a first position (P1) and a second position (P2), positions second probe (30) with the second position (P2) being for electrically contacting an opposing second side (18) of the semiconductor device under test.

REFERENCES:
patent: 5412314 (1995-05-01), Fukunaga et al.
patent: 5467020 (1995-11-01), Boyette et al.
patent: 6384612 (2002-05-01), Freund et al.
patent: 6404181 (2002-06-01), Hikita

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