Double-side polishing method for wafer

Details Double-side polishing method for wafer Double-side polishing method for wafer

2006-06-28

2010-06-01

Rachuba, Maurina (Department: 3727)

Abrading

Abrading process

Glass or stone abrading

C451S262000

Reexamination Certificate

active

07727053

ABSTRACT:
There is provided a double-side polishing method for a wafer of sandwiching a wafer held in a carrier between upper and lower turn tables each having a polishing pad attached thereto and simultaneously polishing both surfaces of the wafer while supplying a slurry to a space between the upper and lower turn tables from a plurality of slurry supply holes provided in the upper turn table, wherein a polishing amount at an outer peripheral portion of the wafer to be polished is adjusted and outer peripheral sag of the wafer is suppressed by supplying the slurry in such a manner that an amount of the slurry supplied from the slurry supply holes provided on an outer side relative to the center of rotation of the upper turn table becomes larger than an amount of the slurry supplied from the slurry supply holes provided on an inner side relative to the same at the time of polishing both the surfaces of the wafer. As a result, the double-side polishing method which can suppress occurrence of the outer peripheral sag of the wafer when the wafer is subjected to double-side polishing can be provided.

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Oct. 12, 2009 European Office Action for corresponding European application No. 06 767 473.9.

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